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Design, Test, and Microfabrication of Mems and Moems: 30 March-1 April 1999, Paris, France (Proceedings of Spie--The International Society for Optical Engineering, V. 3680.)

Design, Test, and Microfabrication of Mems and Moems: 30 March-1 April 1999, Paris, France by Bernard Bourtois
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