Ultimately, Zeiss created mirrors that were the smoothest objects ever made, with impurities that were almost imperceptibly small. If the mirrors in an EUV system were scaled to the size of Germany, the company said, their biggest irregularities would be a tenth of a millimeter. To direct EUV light with precision, they must be held perfectly still, requiring mechanics and sensors so exact that Zeiss boasted they could be used to aim a laser to hit a golf ball as far away as the moon.
