Semiconductor Micromachining, Set

by S.A. Campbell (Editor), H.J. Lewerenz (Editor)

A one-stop reference for semiconductor principles and construction Semiconductor Micromachining is a two-volume set that coordinates the multidisciplinary nature of the field into a single comprehensive reference. Volume 1: Fundamental Electrochemistry and Physics builds a robust foundation of semiconductor concepts, and Volume 2: Techniques and Industrial Applications provides in-depth guidance on the practical aspects of the technology. Appropriate for graduate studies or scientists in academia and industry, this book provides a convenient reference for those who wish to expand their understanding of semiconductor technology.

Hardcover

First published April 30, 1998