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Design, Modeling and Control of Nanopositioning Systems
Introduction.- Piezoelectric Transducers.- Types of Nanopositioners.- Mechanical Flexure-based Nanopositioners.- Position Sensors.- Shunt Control.- Feedback Control.- Force Feedback Control.- Feedforward Control.- Command Shaping.- Hysteresis Modeling and Control.- Charge Drives.- Noise in Nanopositioning Systems.- Electrical Considerations.
428 pages, Paperback
First published July 22, 2014
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