Transient Thermal Processing Techniques in Electronic Materials

by N.M. Ravindra, R.K. Singh (Editor)

Proceedings of a Symposium Sponsored by the Thin Films & Interfaces Committee of the Electronic, ... and Photonic Materials Division (Empmd) of

This volume presents a research update of silicon and non-silicon transient processing techniques such as rapid thermal processing, pulsed laser processes, flash evaporation, jet processes, and more. Also covered are process sensors, equipment issues, and the manufacturing perspective.

179 pages, Paperback

First published March 1, 1997