Contamination-Free Manufacturing for Semiconductors and Other Precision Products

by Robert R. Donovan

Recognizing the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology, this practical reference provides in-depth and advanced treatment on the origins, procedures, and disposal of a variety of contaminants. It uses contemporary examples based on the latest hardware and processing apparatus to illustrate previously unavailable results and insights along with experimental and theoretical developments.

Ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS)!

Summarizing up-to-date control practices in the industry, Contamination-Free Manufacturing for Semiconductors and Other Precision

460 pages, Hardcover

First published March 14, 2001