Secondary Ion Mass Spectrometry Sims IV: Proceedings of the Fourth International Conference, Osaka, Japan

by Alfred Benninghoven (Contributor), H.W. Werner, J. Okano

This volume contains the proceedings of the Tenth International Converence on Secondary Ion Mass Spectrometry (SIMS X). It covers a diverse field of research ranging from environmental problems to depth profiling and semiconductors. In doing so, it provides an excellent overview of current research and technology by acknowledged experts in their specialised fields.

503 pages, Paperback

First published April 1, 1984