Advanced Gate Stacks for High-Mobility Semiconductors

by Athanasios Dimoulas (Editor), M. HEYNS (Editor), Evgeni P. Gusev (Editor)

This book provides a comprehensive monograph on gate stacks in semiconductor technology. It covers the major latest developments and basics and will be useful as a reference work for researchers, engineers and graduate students alike. The reader will get a clear view of what has been done so far, what is the state-of-the-art and which are the main challenges ahead before we come any closer to a viable Ge and III-V MOS technology.

406 pages, Hardcover

First published January 1, 2007