Precision Motion Control: Design and Implementation

by Kok Kiong Tan

Precision manufacturing is a development that has been gathering momentum over the 20th century and accelerating over 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes, (lithography, wafer probing, inspection), co-ordinate measuring machines (CMMs) and precision metrology systems (scanning probe microscopy (SPM)), robot/machine tools to carry out micro-assembly (MEMS) and delicate short wavelength laser processes. As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization.

232 pages, Hardcover

First published April 20, 2001