Secondary Ion Mass Spectrometry: SIMS X

by Alfred Benninghoven (Editor)

This volume contains the proceedings of the Tenth International Converence on Secondary Ion Mass Spectrometry (SIMS X). It covers a diverse field of research ranging from environmental problems to depth profiling and semiconductors. In doing so, it provides an excellent overview of current research and technology by acknowledged experts in their specialised fields.

1084 pages, Paperback

First published May 1, 1997