Semiconductor Material and Device Characterization

by Dieter K. Schroder

The first book devoted to modern techniques of semiconductor characterization, this comprehensive guide to semiconductor measurement methods is detailed enough for a two-term graduate course. Organized for quick access so that it can be used as a handbook of specific characterization techniques. Processes are characterized through the use of test structures and the main techniques used within the semiconductor industry are thoroughly explained. While the majority of the book is devoted to widely used electrical characterization methods, the more specialized optical, chemical and physical methods are also covered. Contains over 1,300 references.

624 pages, Hardcover

First published July 4, 1990

Reviews

[Kyle]

Very comprehensive for semiconductor device MEASUREMENTS, much in the same way Sze is comprehensive for device theory.

[Amna Riaz]

if it gets open then its great