Laser Chemical Processing for Microelectronics

by K. G. Ibbs (Editor), Richard Magee Osgood (Editor)

Nine contributors describe the application of laser processing techniques in the fabrication of semiconductor materials and devices for the microelectronics industry. Chapters focus on deposition, etching, doping, and direct write capability (pantography) beginning with a review of the current literature and understanding. Annotation copyright Book News, Inc. Portland, Or.

192 pages, Hardcover

First published February 24, 1989