Integrated Processing for Micro- And Optoelectronics: Proceedings of Symposium d on Integrated Processing for Micro- And Optoelectronics of the 1993 ... Research Society Symposia Proceedings)

by Symposium d on Beam Processing and Laser Chemistry

These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing and present research results upon which these manufacturing technologies are built.

320 pages, Hardcover

First published January 1, 1994