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Vlsi (Technology, Design & Basic Of Micro Elec.
Table of Contents Introduction to VLSI Technology Film Deposition Epitaxy Process Diffusion Process Ion Implantation Lithography Photoresist and Etching MOSFET and MOS Fabrication Technology Simulation Process (IC Fabrication Steps) Bipolar IC Technology Appendices Examination Paper Index
450 pages, Paperback
Published January 1, 2010
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