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Foundations of Mems
For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals.
"Foundations of MEMS" is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology -- all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
576 pages, Paperback
First published August 1, 2005
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Displaying 1 - 2 of 2 reviews
April 11, 2013
It's great
April 14, 2017
I needed the book for an undergrad MEMS course . Good to understand sensing and actuation methods, and updated with the latest trends in MEMS industry
Displaying 1 - 2 of 2 reviews