Introduction to Microlithography

by Larry F. Thompson (Editor)

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major the physics of the lithographic process, organic resist materials, resist
processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific
aspects of microlithography.

540 pages, Hardcover

First published May 5, 1994

Reviews

[Nathan Rose · Rating 4 out of 5]

Interesting. Didn't read the whole thing (not everything applied)