Fundations Of MEMS

by Chang Liu

For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology -- all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.

Textbook Binding

First published August 1, 2005

Reviews

[Aldo Matz]

It's great

[Joe Cole]

I needed the book for an undergrad MEMS course . Good to understand sensing and actuation methods, and updated with the latest trends in MEMS industry