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Semiconductor Devices: Physics and Technology
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconduct ...more
Hardcover, 576 pages
Published September 25th 2001 by Wiley
(first published May 14th 1985)
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