Emerging Lithographic Technologies for Nanopatterning

by Ampere A. Tseng (Editor), Walt Trybula (Editor)

As devices become progressively smaller, nanofabrication is increasingly essential for the realization of nanotechnologies that require such structures. Emerging Lithographic Technologies for Nanopatterning reviews conventional and non-conventional technologies for fabricating semiconductor circuits, particularly on microchips. Emphasizing multidisciplinary principles, methodologies, and practical applications, coverage includes emerging techniques for next-generation semiconductor lithography, scanning probe microscope lithography, self-assembly, imprint lithography, and techniques specifically developed for making nanoscale particles, wires, and tubes as well as molecular circuits and devices.

700 pages, Hardcover

Published March 16, 2010