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9 distinct works
Micromachining and Microfabrication Process Technology: 23-24 October, 1995, Austin, Texas (Proceedings of Spie--The International Society of Optical Engineering, V. 2639.)
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Semiconductor Equipment and Materials International
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National Institute of Standards and Technology
,
Society of Photo-Optical Instrumentation Engineers
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— published 1995
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Microelectronic Structures and Microelectromechanical Devices: 24 October, 1995, Austin, Texas (Proceedings of Spie--The International Society for Optical Engineering, V. 2641.)
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Micromachined Devices and Components 23 24 October 1995: 23-24 October, 1995, Austin, Texas (Proceedings of Spie--The International Society for Optical Engineering, V. 2642.)
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— published 1995
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Advanced Semiconductor Manufacturing Conference & Workshop, 1992
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— published 2006
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Ieee/Semi Advanced Semiconductor Manufacturing Conference, 1994
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— published 1994
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24th IEEE/CPMT International Electronics Manufacturing Technology Symposium Proceedings
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— published 1999
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Twenty Fourth IEEE/Cpmt International Electronics Manufacturing Technology Symposium: Proceedings 1999 Iemt Symposium: October 18-19, 1999, Austin, TX, USA
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— published 1999
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Optical Microlithography XI: 25-27 February, 1998, Santa Clara, California (Proceedings of Spie--The International Society for Optical Engineering, V. 3334.)
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Society of Photo-Optical Instrumentation Engineers
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Semiconductor Equipment and Materials International
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Sematech (Organization)
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— published 1998
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Optical Microlithography IX: Proceedings : 13-15 March 1996 Santa Clara, California (Proceedings of Spie--The International Society for Optical Engineering, V. 2726.)
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Semiconductor Equipment and Materials International
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Sematech (Organization)
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— published 1996
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