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Fundamental Electron Interactions with Plasma Processing Gases
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Fundamental Electron Interactions with Plasma Processing Gases

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This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specia...more
Hardcover, 781 pages
Published December 31st 2003 by Springer (first published 2003)
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