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Scanning Electron Microscopy: Physics of Image Formation and Microanalysis
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contr...more
Hardcover, 541 pages
Published
October 16th 1998
by Springer
(first published January 1986)
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