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Microsensors, MEMs, and Smart Devices

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Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ...more
Hardcover, 522 pages
Published December 27th 2001 by Wiley (first published December 15th 2001)
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